Probing Machines｜FAQ | ACCRETECH

Please tell us what measures to take when cutting the power supply for a long period (when halting the equipment for around a week, for example, during year-end and New Year's holidays or summer holidays).

Remove the probe card.
Check that there are no wafers inside the equipment.
If a chiller pump using tap water is halted for 5 days or longer, completely remove the tap water from the tank.
After confirming that there are no problems with the items above, turn off the power supply.
●Contact our customer support for details.

Please tell us what measures to take when starting up power supply after its long-term (after halting the equipment for around a week, for example, during year-end and New Year's holidays or summer holidays).

Pour fresh water from the tap water into the tank of a chiller pump that supplies water from the tap water.
After confirming that all the required utilities are connected, turn on the equipment’s power supply and confirm that the equipment starts up normally.
●Contact our customer support for details.

The power cannot be turned on. (When starting up or re-starting the equipment, it does not successfully start up or freezes part way through.)

Is the Windows desktop shown part way displayed? Does the start-up stop at the ACCRETECH logo?
Has a fuse blown?
Are the 3 fans all rotating?
Is the 5V, ±12V output of the control system power supply normal? (in the off direction)
●The HDD may be malfunctioning.
　Check the fuse and replace it if it has blown.
　Perform an investigation of the 3 fans and replace any malfunctioning fans.
　Check the output of the control system power supply according to the maintenance manual.
　If normal functioning is still not restored, please contact our customer support.

A reticle search error has occurred.

Is the reticle displayed on the monitor screen? If it is not displayed, it may be that the reticule detection is not achieved with the image during reticle search.
●Firstly, check the status during the needle alignment. If the reticle is not at all visible, please contact our customer support.

A needle search error has occurred during the needle alignment.

Is the needle point displayed on the monitor screen? If it is not displayed, when aligning the needle, the focus may not match or the search position may be off.
●Check the status during the needle alignment.
　If there is no problem, please contact our customer support.

It is not possible to make a chuck edge measurement.

Is the chuck edge displayed on the monitor screen? If it is not displayed, the alignment camera may have a defect.
●Check that the camera image is displayed during initialization.
　If there is no problem, please contact our customer support.

The chuck alignment image is out of focus during initialization.

Is the capacity sensor mounting loose?
●Adjust the capacity sensor mounting height so that it is within ±0.3V, and tighten the screws.

"A beam search error" occurs. Please let us know how to deal with it.

Is the beam image displayed on the monitor screen?
●Check this to see if the defect can be isolated as being in the camera’s main unit.

A defect occurs with the pop-out sensor.

The wafer may be popping out of the cassette.
A cover or similar object may be interfering in the response range of the pop-out sensor.
There may be a defect with the centering sensor.
●Check the condition of the wafer and the light intensity of the sensor.

A Loadport non-initialization error occurs.

Are there any objects placed on the Loadport?
●Check the condition of the sensor on top of the Loadport.

The needle does not make contact. There is a contact defect.

Is the needle trace made successfully?
Is there a defect in the tester’s pogo pin, etc.?
●If no defect can be observed with either, please contact our customer support.

A needle trace misalignment has occurred.

Check the details of how it is misaligned, the equipment information, the conditions under which it occurs, and provide information such as logged data.
●Our customer support will check the relevant logs collected.

A temperature control error occurs.

To confirm the error details, machine the lot (START) again to log data.
●Our customer support will check the relevant logs collected.

A temperature control error occurs with the temperature chuck.

When you press START, what error message is displayed?
●Contact our customer support for details.

The temperature does not fall to the temperature set for the low-temperature chuck

What are the respective temperatures of the set temperature, the chuck temperature, the dew point temperature, and the coolant temperature?
●Contact our customer support for details.

The temperature is not stable.

What are the respective temperatures of the set temperature, the chuck temperature, the dew point temperature, and the coolant temperature?
The temperature controller or the substrate may be malfunctioning.
●Contact our customer support for details.

An error has occurred (related to the chiller) with the message, “Error information has been obtained from the temperature regulator (chiller). The temperature controller will be stopped.” Please let us know how to deal with it.

Get parameters and other data for the operating conditions at the set temperature at which the error message is indicated, and investigate the cause of it.
●It may not be possible to log data on some chiller models.
　Information needs to be gathered to confirm the cause, so please contact our customer support.

Please let us know how to deal with the error message, “The card replacement unit position is irregular.”

Could you let us know the timing at which the error occurred during card replacement?
●From the timing of the error, we identify whether the prober or the tester is the cause of the error.

A card replacement error has occurred.

Did the error occur when the card was installed? Did the error occur when the card was separated? If the card remains, there is the possibility of the card being damaged, so do not perform operations.
●Contact our customer support for details.

A servo alarm occurs.

Where is the target driver?
What driver error code is displayed?
●Contact our customer support for details.

Arm suction and chuck suction errors occur.

Check the suction pressure and the vacuum source pressure. If this is not normal, there may be contaminants adhering to the wafer’s rear surface, to the arm, or to the chuck.
●After cleaning the arm and the chuck, change the wafer and re-load. In addition, check the rear surface of the wafer.

Please let us know how to set the action parameters and the device parameters.

Please refer to the instruction manual.
●We recommend taking the operations training course.

The screen freezes.

(1) After performing a send during tester communication, the screen may freeze if the response cannot be received.　
　 ● Check the tester communication.
(2) When moving to the origin position, if the origin position sensor cannot confirm this, the screen may freeze.　
　 ●Confirm whether the origin sensor responds.
If the problem is not resolved through the measures above, please contact our customer support.

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上記対応で解決しない場合には弊社サービスにご連絡をお願い致します。