ZEISS XENOS®
A coordinate measuring machine is stepping into a new realm
World’s highest class* maximum permissible error of length measurement
E0, MPE = 0.2+L/1000 µm
* Comparison among tactile coordinate measuring machines which have about the same measuring range as ZEISS XENOS®. Based on our research.
The reference
XENOS----a naming associated with the highest peak. This coordinate measuring machine, that is just right for that name, is stepping into new territory, far surpassing the precision and measurement efficiency until now due to the innovative technology. ZEISS XENOS® is the reference machine that achieves extremely high measurement accuracy.
Since its release in 2014, the ZEISS XENOS® has been used in various areas where high precision is required, including R&D institutes, aerospace industry, optical equipment, and high precision master gauges that support manufacturing sites. Featuring the world's highest-class* measurement precision, this coordinate measuring machine has consistently delivered the best possible performance. Furthermore, in 2024, the guaranteed accuracy has been improved by stabilizing the production quality through exploiting the know-how been gained so far since the release of the ZEISS XENOS® and improving the calibration and correction techniques, such as adopting a new gauge dedicated to the machine.
The ZEISS XENOS®, which delivers a stunning “ultra-high precision” exceeding the conventional high precision level, supports customers in their advanced quality control.
* Comparison among tactile coordinate measuring machines which have about the similar measuring range as ZEISS XENOS®. Based on our research.
Innovative silicon-carbide ceramic used for key body components
In developing ZEISS XENOS®, the material was studied from the stage of manufacturing and silicon carbide ceramic of the size that had previously been impossible to manufacture was successfully put to practical use. Thus, major structural components of ZEISS XENOS® are made of silicon carbide ceramic. Compared to the aluminum ceramic, this silicon-carbide ceramic exhibits lower expansion (0.5 times thermal expansion), higher rigidity (1.3 times rigidity) and less weight (0.8 times mass) and serves as an indispensable
factor in realizing higher accuracy.
Virtual central drive
Unlike typical coordinate measuring machines, ZEISS XENOS® has a linear drive structure for all axes. This structure is an unique feature of ZEISS XENOS® as very few measuring machines with linear drives have so far been applied. In addition to the existing central drive concept, the newly developed Y-axis dual drive structure (virtual central drive) has accomplished extremely high repeatability throughout the measuring range by optimizing the drive control on right and left ends according to the center of gravity change caused by X-axis movement. Precision positioning technology that has been nurtured by ZEISS for 30 years and state-of-the-art control algorithm to optimally distribute the thrust of left and right drive systems have realized the virtual central drive, a technology patented by ZEISS.
Commitment to accuracy
Generally, scales of coordinate measuring machines require temperature correction to reduce errors caused by thermal expansion. In developing ZEISS XENOS®, Zerodur® scale, whose thermal expansion is almost zero, was designed to achieve higher resolution exclusively for ZEISS XENOS®, and the surface tension floating method, which is a patented technology, was applied to attach the scale to avoid the influence of the bimetallic effect. This eliminates the uncertainty of temperature correction.
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