Feature
Supports full-automation processing of various workpieces such as wafers of up to Φ200 mm,
wafers mounted on the dicing frame,PLP substrates of up to 300 mm on a side,
and boules of up to 50 mm (5 kg) and batch processing
Feature
Supports full-automation processing of various workpieces such as wafers of up to Φ200 mm,
wafers mounted on the dicing frame,PLP substrates of up to 300 mm on a side,
and boules of up to 50 mm (5 kg) and batch processing