Feature
VEGA PLANET is a tool to perform various work, which has been done at the machines, on computers.
Various preparation and operation check work done at the machines can be transferred from the clean room to the office. This would improve the productivity of operators and allow machines to be used exclusively to conduct measurement, to which they are originally intended, thus increasing the operation rate of expensive testers and probers. This tool also controls the movement of operators to and from the clean room, ensuring a dust-free environment in the room.
Tool
VEGA PLANET provides tools for:
Creating and editing device data (device commander)
Monitoring operation status and remote tool (remote monitor tool)
Viewing and editing map files (map editor)
Analyzing logs (log analysis tool)
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