Features
This equipment provides a stable wafer measurement environment in the range -55℃ to +200℃
This is the standard model of our chiller for use with a wafer prober.
It enables control of the chuck temperature in the range -55℃ to +200℃.*1
Air cooling system that does not require primary cooling water
Equipped with an inverter control freezer
Circulating fluid recovery function
Purging air control function for the probers
*1 Depending on the prober models
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