Features
This equipment provides a high speed temperature control and stable wafer measurement environment in the range -55℃ to +200℃
This is the high speed model of our chiller for use with a wafer prober.
It enables high speed temperature changes and stable temperature control, in the range -55℃ to +200℃.*1
To match your environment, it is possible to switch between the water-cooling operation using the primary cooling water and the air-cooling operation.
Equipped with an inverter control freezer
Circulating fluid recovery function
Purging air control function for the probers
*1 Depending on the prober models
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