Semiconductor Manufacturing Equipment
U-FW-200R
Constant Temperature Water Machine
Cutting Water Recycling
Cutting Water Recycling Chiller

U-FW-200R

The wastewater generated during the dicing process is collected, and the filtration water is generated by the sedimentation tank cartridge filter. Then, the automatic adjustment of the liquid temperature enables both a low environmental impact and a stable dicing environment.

Features

The wastewater generated during the dicing process is collected, and the filtration water is generated by the sedimentation tank cartridge filter. Then, the liquid temperature is stabilized via automatic adjustment, enabling supply to the dicing machine. A system is mounted that adjusts the temperature of the cooling water of the spindle used in the dicing machine, thus providing a circulatory supply. 

U-FW-200R

Specifications

Cutting water system

Supply capability 12 L/ min 600 W
Cooling capability 600 W
Cooling capability 2000 W
Temperature setting 20 to 27℃
Temperature precision Within 1℃
Filter 15 µm x 1, 5 µm x 1

Spindle cooling water system

Supply capability 6 L/min
Cooling capability 600 W
Heating capability 600 W
Temperature setting 20 to 25℃
Temperature precision Within 1℃

Specifications

Dimensions (W x D x H) 430 mm x 920 mm x 1,500 mm
Weight 230 kg

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