AD3000T-PLUS

The opposing type 2-axis spindles are arranged diagonally, to achieve both a reduced space design and high maintainability.
All daily operations such as blade replacement and maintenance work can be performed using front access from the front of the device. Access from the side is not necessary, so equipment layout is possible with small gaps. This contributes to labor-saving in clean rooms.

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Features Specifications Enhancement of Optional Function Maintenance

Features

・Reduced space design

This is an originally developed diagonal layout design. Everything from normal operation to maintenance is accessible from the front.
When multiple units are installed in a line, since the lateral surface maintenance area can be reduced, 5 units of the AD3000T-PLUS can be installed in the installation space for 4 units of the conventional devices.

・Enhanced productivity (throughput)

Waste-free processing is achieved with an opposing type 2-axis spindle design and the minimum required X movement.
X axis speed: 1,000 mm/sec, Ｙ axis speed: 300 mm/sec, Ｚ axis speed: 80 mm/sec
Servomotors are used for all the X, Y, Z axes to speed up the axis speed
A reduction in processing time is achieved through optimization of the control software + synchronous control of the 3 axes
Two optical cutter-set (common name: OPC) units are mounted as standard. Reduction of the standby time by simultaneous set-up

・High-performance, high-output spindle equipped as standard

1.8 kW rating, maximum rotation speed of 60 krpm (a 2.2 kW rating, high-torque spindle can also be mounted as an option)
Processing of a wide range of materials is supported, from silicon to difficult-to-cut materials.

・Operability

A 17-inch touch panel + GUI (Graphical User Interface) are used.
Simply by touching the iconized buttons, straightforward and comfortable operation is achieved.

・Plenty of optional settings

Intermediate dress feature, built-in UV irradiation system, barcode reader automatic recipe switching feature, ionizer, etc.
The major optional units can be built-in due to the smaller footprint of the optional units and the optimized internal design

・Over 10000 recipes storable in the HDD

・USB port equipped as standard

(USB memory can be used as an external memory device)

・An echo function equipped as standard

With the optimization of the vacuum control, the amount of air consumption is reduced by 50% or more compared to our conventional devices.

Specifications

Maximum work size		Φ 305 mm
Maximum supported frame		12 inch (SEMI G74-0699)
Spindle	Number of rotations	60,000 rpm
	Maximum blade diameter	Φ 60 mm (2-Inch) Φ 80 mm (3-Inch) (option supported)
	Rating output	1.8 KW
X axis	Cuttable range	310 mm
X axis	Fastest speed	1,000 mm/s
Y1/Y2 axis	Cuttable range	310 mm
	Fastest speed	300 mm/s
	Control resolution	0.078 µm
	Cumulative precision	0.002 mm / 310 mm
Z1/Z2 axis	Stroke	35 mm
	Resolution	0.002 µm
	Fastest speed	80 mm/sec
	Repeatability	0.001 mm
Θ axis	Rotation range	380°
Specifications	Voltage	3 Phase AC200 to 220 V ±10％ (Other than the above, compatible with a transformer)
	Consumed electric power	6.0 kVA (MAX)
	Air supply pressure	0.55 to 0.7 MPa
	Average consumed volume of air	210 L/min (at 0.55 MPa)
	Average consumed volume of clean air	140 L/min
	Supply water pressure (cutting water, other)	0.3 to 0.5 MPa
	Supply water Maximum flow rate	Cutting water: 10.0 L/min Water curtain: 3.0 L/min Other: 0.6 L/min
	Cooling water pressure	0.3 to 0.5 MPa
	Cooling water flow rate	3.4 L/min (at 0.3 MPa)
	Exhaust flow rate	5.0 m³/min or greater
Dimensions (W x D x H)		1,290 mm x 1,530 mm x 1,900 mm
Weight		1,360 kg

Automatic Blade Replacement Feature (Optional)

ABES (Auto Blade Exchange System)
In recent years, as part of factory automation, the introduction of automation into semiconductor back-end processing is progressing. The Φ 300 mm line in particular, from the viewpoint of them being unmanned and highly efficient, has an increase in activity to introduce automation. And, in the AD3000T-PLUS, in order to meet those demands, it is now possible to mount an automatic blade replacement system (Auto Blade Exchange System: ABES). In this system, the end of life of the HUB blade is automatically detected, from the HUB blade replacement to the return to processing is completely automated, and so the equipment downtime is minimized. In addition, depending on the individual operation status, the flange condition control feature, and the automatic adjustment feature of the blade damage detector can be mounted as options.