AD3000TW
The device follows the AD3000T-PLUS design concept. The dedicated design is specialized for large package substrate dicing, starting with the fan-out WLP. Selecting the special dicing frame and jig table contributes to support of application of multiple sheets to the package substrate, enhanced productivity, and reduced cost.
Features
・Reduced space design
This is an originally developed diagonal layout design. Everything is accessible from the front, whether for normal operation or for maintenance.
When multiple units are installed in a line, since the lateral surface maintenance area can be reduced, 5 units of the AD3000TW can be installed in the installation space for 4 units of the conventional devices.
・Supports processing of the industry’s smallest sized substrates
Large panel substrates up to 315 mm x 315 mm can be supported.
Selecting the special dicing frame and square table contributes to support of application of multiple sheets to the package substrate, enhanced productivity, and reduced cost.
(1) Large panels of up to 315 mm x 315 mm can be supported
(2) Multiple substrates can be applied (example of application of 4 sheets of 315mm x 65 mm)
・High-performance, high-output spindle equipped as standard
1.8 kW rating, maximum rotation speed of 60 krpm (a 2.2 kW rating, high-torque spindle can also be mounted as an option)
A wide range of materials are supported, such as QFN, BGA, and ceramic substrates.
・Enhanced productivity (throughput)
The opposing type 2-axis spindle design achieves lean processing with the minimum required X axis movement.
Servomotors are used for all the X, Y, Z axes to speed up the axis speed.
A reduction in processing time is achieved through optimization of the control software + synchronous control of the 3 axes.
・Operability
A 17-inch touch panel + GUI (Graphical User Interface) are used.
Simply by touching the iconized buttons, straightforward and comfortable operation is achieved.
The device is equipped with an operation system in common with the AD/SS Series whose use is familiar.
Specifications
| Maximum work size | Φ300 mm, □315 mm | |
| Handling method | Frame-handling spindles | |
| Spindle | Layout | opposing type twin |
| Rating | 1.8 kW | |
| Highest number of rotations | 60,000 rpm | |
| X axis | Send speed entry range | 0.1 to 300 mm/sec |
| Return speed | 1,000 mm/sec | |
| Y axis | Resolution | 0.000078 μm |
| Positioning precision | Within 0.002 mm/330 mm | |
| Z axis | Repeatability | 0.001 mm |
| Standard compatible blade diameter | Φ 48 to 60 mm | |
| Specifications | Dimensions (W x D x H) | 1,560 mmx 1,670 mmx 1,900 mm |
| Weight | 1,700 kg | |
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