AD3000T-HC PLUS

The device follows the AD3000T-PLUS design concept. As a new added value, it supports both wafer handling specifications using FOUP cassettes and frame handling specifications using regular cassettes. A variety of applications from half-cut to full-cut dicing are available on this one machine.

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Features Specifications Specifications Maintenance

Features

・Reduced space design

This is an originally developed diagonal layout design. Everything from normal operation to maintenance is accessible from the front.
When multiple units are installed in a line, since the lateral surface maintenance area can be reduced, 5 units of the AD3000T HC-PLUS can be installed in the installation space for 4 units of the conventional devices.

・Automatic switching of WH (wafer handling) and FH (frame handling)

Easy automatic switchover between wafer handling specifications and frame handling specifications is possible with a recipe setting.
This reduces the man-hours for a change of setup, and contributes to the prevention of operating mistakes.

・FOUPS Opener equipped as standard

Automatic opening and closing of the FOUP lid reduces the risk of wafer damage and reduces the risk of environmental pollution during lot handling.

・Cutting table in-plane correction function (Active-Z) is equipped as standard

This corrects the table in-plane height variation, and achieves high-precision height control.
In particular, it supports the high-precision Z height control required in the half-cut application.

・Enhanced productivity (throughput)

Waste-free processing is achieved with an opposing type 2-axis spindle design and the minimum required X movement.
X axis speed: 1,000 mm/sec, Ｙ axis speed: 300 mm/sec, Ｚ axis speed: 80 mm/sec
Servomotors are used for all the X, Y, Z axes to speed up the axis speed
A reduction in processing time is achieved through optimization of the control software + synchronous control of the 3 axes
Two optical cutter-set (common name: OPC) units are mounted as standard. Reduction of the standby time by simultaneous set-up

・Operability

A 17-inch touch panel + GUI (Graphical User Interface) are used.
Simply by touching the iconized buttons, straightforward and comfortable operation is achieved.
The device is equipped with an operation system in common with the AD/SS Series whose use is familiar.

Specifications

Maximum work size		Φ 305 mm
Maximum supported frame		12 inch (SEMI G74-0699)
Spindle	Number of rotations	60,000 rpm
	Maximum blade diameter	Φ 60 mm (2-Inch)
	Rating output	1.8 KW
X axis	Cuttable range	310 mm
X axis	Fastest speed	1000 mm/s
Y1/Y2 axis	Cuttable range	310 mm
	Fastest speed	300 mm/s
	Control resolution	0.078 μm
	Cumulative precision	0.002 mm / 310 mm
Z1/Z2 axis	Stroke	34 mm
	Resolution	0.002 μm
	Fastest speed	80 mm/sec
	Repeatability	0.001 mm
Θ axis	Rotation range	380°
Specifications	Voltage	3 Phase AC200 to 220 V ±10% (Other than the above, compatible with a transformer)
	Consumed electric power	6.0 kVA (MAX)
	Air supply pressure	0.55 to 0.7 MPa
	Average consumed volume of air	210 L/min (at 0.55 MPa)
	Average consumed volume of clean air	140 L/min
	Cutting water, other (pressure)	0.3 to 0.5 MPa
	Cutting water, other (maximum flow rate)	Cutting water: 10.0 L/minz Water curtain: 3.0 L/min Other: 0.6 L/min
	Cooling water (pressure)	0.3 to 0.5 MPa
	Cooling water (maximum flow rate)	3.4 L/min (at 0.3 MPa)
	Exhaust flow rate	5.0 m³/min more
Dimensions (W x D x H)		1290 mm x 1530 mm x 1900 mm
Weight		1330 kg

Dicing Machine Network Support (Optional)

Saw-NET/Saw-NET Pro
Efficiently manage the production site from the office! Saw-Net is a new network system provided by Accretech aimed at the AD/SS Series.
The features required for dicer management are provided in the package, so you can use the network without any hassle. By connecting multiple devices via the network, visualization of each device’s operation status, increase in the operating rate, and, when the remote access feature is used, remote operation are all available.