TD2A-3S/TD1A-S
This equipment dissolves a small amount of CO₂ gas into pure water by using a special hollow-fiber membrane and controls the specific resistance value of pure water.
Use this bubbler to prevent the workpiece from being damaged by electrostatic discharge and to keep particles from attaching to the workpiece.
Features
The bubbler rarely fails because it has no complex mechanism
The unique piping distribution method enables easy specific resistance value control and offers a high level of stability
The specific resistance value of pure water can be controlled by adjusting the mixing ratio of pure water and the CO₂ gas-saturated water generated by the CO₂ gas dissolution module.
Long service life of the CO₂ gas supply module
The compact bubbler unit can be built into the dicing machine
* Depending on the options used, the bubbler can be installed outside the machine. For details, contact us.
The resistivity meter in the dicing machine allows real-time monitoring of the specific resistance value of pure water
Specifications
| Unit |
TD2A3-S | TD1A-S | |
| Flow range | L/min | 10 to 25 | 1 to 16 |
| Specific resistance value setting range | MΩ・cm | 0.3 to 1.0 | 0.1 to 1.0 |
| Pure water supply pressure (max.) | MPa | 0.5 | |
| Supplied pure water temperature | ℃ | 20 to 25 | |
| Dimensions |
mm | 90×335×300 | |
| Weight (when dry) |
kg | 8 | |
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